Real-time current density imaging of electromigration processes using scanning magnetoresistive microscopy

Recently, we have successfully demonstrated the use of scanning magnetoresistance microscopy (SMRM) to directly image electrical current densities at sub-micron length scales. One promising application of this technique is the imaging of electro migration (EM) failure modes in current-carrying interconnects at elevated temperatures. We have designed and demonstrated a technique capable of real-time observation of current flow in passivated conductors undergoing EM processes at length scales <100 nm. In this presentation, we will explain the details of the technique and present results from relevant physical systems.