Title :
Determination of lattice parameters of SCS nanobeam in process of tensile test using MEMS actuator
Author :
Hongjiang Zeng ; Tie Li ; Qinhua Jin ; Yuelin Wang ; FangFang Xu
Author_Institution :
State Key Labs. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China
Abstract :
We present a novel experimental method for observing the lattice behavior of single crystal silicon (SCS) nanobeam in process of tensile testing. A TEM in-situ nanobeam tensile testing device has been fabricated and the lattice parameters of SCS nanobeam of different tensile stress have been measured using selected-area electron diffraction (SAED). The results suggest that the trends of the lattice parameters consists with the increasing tensile stress in the SCS nanobeam, and a certain degree of distortion of lattice and movements of crystal dislocations could happen during SCS nanobeam tensile testing.
Keywords :
beams (structures); electron diffraction; elemental semiconductors; microactuators; nanotechnology; silicon; tensile strength; tensile testing; MEMS actuator; SAED; SCS nanobeam; TEM in-situ nanobeam tensile testing device; crystal dislocation; lattice parameter; selected-area electron diffraction; single crystal silicon; tensile stress; Actuators; Crystals; Diffraction; Lattices; Nanoscale devices; Silicon; Testing; MEMS actuator; SCS nanobeam; lattice parameter; tensile test;
Conference_Titel :
Assembly and Manufacturing (ISAM), 2011 IEEE International Symposium on
Conference_Location :
Tampere
Print_ISBN :
978-1-61284-342-1
Electronic_ISBN :
Pending
DOI :
10.1109/ISAM.2011.5942299
