Title :
Method for read width determination at high track densities by imaging the magnetic field emitted by narrow Cu waveguides
Author :
Crawford, T.M. ; Seigler, M.A. ; Covington, M. ; Eckert, A. ; Langzettel, A.K.
Author_Institution :
Seagate Res., Seagate Technol., Pittsburgh, PA, USA
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, we have characterized the magnetic field from waveguides with widths ranging from 1 /spl mu/m to < 100 nm, in both single and dual wire geometrics. Our Cu waveguides are fabricated by a combination of conventional optical lithography and electron beam lithography. The magnetic field of the wire is detected using giant magnetoresistance (GMR) read sensors, and the measurements are performed.
Keywords :
coplanar waveguides; copper; giant magnetoresistance; magnetic fields; magnetic recording; Cu; Cu waveguides; dual wire geometrics; electron beam lithography; giant magnetoresistance; high track densities; magnetic field emission; magnetic recording; narrow Cu waveguides; optical lithography; read sensors; read width determination; Electron optics; Geometrical optics; Giant magnetoresistance; Lithography; Magnetic field measurement; Magnetic fields; Magnetic sensors; Optical imaging; Optical waveguides; Wire;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230670
