DocumentCode
2051557
Title
Method for read width determination at high track densities by imaging the magnetic field emitted by narrow Cu waveguides
Author
Crawford, T.M. ; Seigler, M.A. ; Covington, M. ; Eckert, A. ; Langzettel, A.K.
Author_Institution
Seagate Res., Seagate Technol., Pittsburgh, PA, USA
fYear
2003
fDate
March 30 2003-April 3 2003
Abstract
In this paper, we have characterized the magnetic field from waveguides with widths ranging from 1 /spl mu/m to < 100 nm, in both single and dual wire geometrics. Our Cu waveguides are fabricated by a combination of conventional optical lithography and electron beam lithography. The magnetic field of the wire is detected using giant magnetoresistance (GMR) read sensors, and the measurements are performed.
Keywords
coplanar waveguides; copper; giant magnetoresistance; magnetic fields; magnetic recording; Cu; Cu waveguides; dual wire geometrics; electron beam lithography; giant magnetoresistance; high track densities; magnetic field emission; magnetic recording; narrow Cu waveguides; optical lithography; read sensors; read width determination; Electron optics; Geometrical optics; Giant magnetoresistance; Lithography; Magnetic field measurement; Magnetic fields; Magnetic sensors; Optical imaging; Optical waveguides; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7647-1
Type
conf
DOI
10.1109/INTMAG.2003.1230670
Filename
1230670
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