Platinum Black Electroplated Impedance Particle Sensor

Author

Zheng, Siyang ; Liu, Mike ; Kasdan, Harvey L. ; Tai, Yu-Chong

Author_Institution

Caltech Micromachining Lab., California Inst. of Technol., Pasadena, CA

fYear

2006

fDate

18-21 Jan. 2006

Firstpage

87

Lastpage

91

Abstract

The paper presents a micro electrical impedance particle sensor. To solve the problem of large electrode electrolyte interface impedance, we electroplated the electrodes with platinum black. Devices are fabricated with integrated parylene technology. An electrical model for the system is proposed and analytic solutions are obtained. Impedance spectra measurement of the device filled with various media are in excellent agreement with model analysis. Signals from individual 10 mum polystyrene beads passing the sensing electrodes are successfully obtained

Keywords

electric impedance measurement; electrochemical electrodes; microsensors; platinum; electrolyte interface impedance; electroplated impedance particle sensor; impedance spectra measurement; integrated parylene technology; microelectrical impedance particle sensor; platinum black; polystyrene beads; sensing electrodes; Blood; Capacitance; Counting circuits; Electrodes; Frequency; Image sensors; Immune system; Impedance; Platinum; Sensor systems; electroplating; impedance; particle; paryleen; platinum black;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Conference_Location

Zhuhai

Print_ISBN

1-4244-0139-9

Electronic_ISBN

1-4244-0140-2

Type

conf

DOI

10.1109/NEMS.2006.334628

Filename

4134910