Title :
Thin film inductor for GHz band with CoFeSiO/SiO/sub 2/ multi-layer granular films and its application for power amplifier module
Author :
Ikeda, Ken-ichi ; Kobayashi, K. ; Ota, Kaoru ; Kondo, Riho ; Suzuki, T. ; Fujimoto, M.
Author_Institution :
Taiyo Yuden Co. Ltd., Gunma, Japan
fDate :
March 30 2003-April 3 2003
Abstract :
In this article, we report that multilayer nanogranular thin film and its application for power amplifier (PA) module.
Keywords :
cobalt alloys; ferromagnetic materials; granular materials; iron alloys; magnetic multilayers; magnetic thin film devices; magnetic thin films; power amplifiers; silicon compounds; thin film inductors; CoFeSiO-SiO/sub 2/; CoFeSiO/SiO/sub 2/ multilayer granular films; GHz band; multilayer nanogranular thin film; power amplifier module; thin film inductor; Amorphous magnetic materials; Amorphous materials; Conductivity; Frequency; Inductance; Magnetic films; Permeability; Power amplifiers; Resonance; Thin film inductors;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230691
