High-frequency magnetoelastic multilayer thin films and applications

For the realization of new applications in the field of high-frequency devices with incorporated magnetic layers, like for example coils, transformers, transmission-line structures and especially non-contacting stress sensors, the necessary thin film materials have to be tailored in order to satisfy simultaneously a broad set of materials requirements. These are: a high ferromagnetic resonance frequency, a high magnetic permeability in combination with low losses at the working frequency (0.1 up to 2.45 GHz), a controllable magnetic anisotropy and domain structure, in case of films for mechanical sensors a high change of permeability when stress is applied. Furthermore these materials have to be compatible to the surrounding materials and process steps, which are needed to fabricate the devices.