Title :
Nanotechnology and nanoscaled materials for microsystems application
Author :
Mladlenov, Georgiy ; Koleva, Elena ; Yakymenko, Yuriy ; Spivak, Viktor ; Bogdan, Oleksandr ; Orlov, Anatoliy
Author_Institution :
Inst. of Electron. BAS, Sofia, Bulgaria
Abstract :
Stages of formation and some perspective aspects of nanotechnology development, in particular, nanoelectronics, getting nanomaterials and microsystems device is analyzed in this report.
Keywords :
nanoelectromechanical devices; nanoelectronics; nanostructured materials; microsystem device; nanodimensional mechanical structures; nanoelectronics; nanomaterials; nanotechnology; Atomic measurements; Conducting materials; Electrons; Manufacturing; Nanoelectronics; Nanomaterials; Nanoscale devices; Nanostructured materials; Nanotechnology; Optical surface waves; Electronic and Ion Lithographic; Microsystems; Piezoelectrics Device; Resonators; Synthesis Of Nanostructure; Thin Tapes; anoelectronics;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications and Computer Science (TCSET), 2010 International Conference on
Conference_Location :
Lviv-Slavske
Print_ISBN :
978-966-553-875-2
Electronic_ISBN :
978-966-553-901-8
