Title :
The frequency characteristic of MEMS beam resonator
Author :
Bibikov, Taras ; Bogdan, Oleksandr ; Petrishev, Oleg ; Yakymenko, Yuriy ; Bogdan, Tetiana
Author_Institution :
Res. Inst. Appl. Electron., Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
Abstract :
In this paper the model of the MEMS (microelectromechanical systems) beam resonator.
Keywords :
beams (structures); ferroelectric devices; ferroelectric materials; micromechanical resonators; MEMS; beam; ferroelectric material; frequency characteristic; microelectromechanical systems; resonator; Dielectric constant; Electrodes; Electrostriction; Ferroelectric materials; Micromechanical devices; Polarization; Resonance; Resonant frequency; Resonator filters; Voltage; Frequency Characteristic; MEMS; Resonator;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications and Computer Science (TCSET), 2010 International Conference on
Conference_Location :
Lviv-Slavske
Print_ISBN :
978-966-553-875-2
Electronic_ISBN :
978-966-553-901-8
