DocumentCode
2052606
Title
The frequency characteristic of MEMS beam resonator
Author
Bibikov, Taras ; Bogdan, Oleksandr ; Petrishev, Oleg ; Yakymenko, Yuriy ; Bogdan, Tetiana
Author_Institution
Res. Inst. Appl. Electron., Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
fYear
2010
fDate
23-27 Feb. 2010
Firstpage
363
Lastpage
363
Abstract
In this paper the model of the MEMS (microelectromechanical systems) beam resonator.
Keywords
beams (structures); ferroelectric devices; ferroelectric materials; micromechanical resonators; MEMS; beam; ferroelectric material; frequency characteristic; microelectromechanical systems; resonator; Dielectric constant; Electrodes; Electrostriction; Ferroelectric materials; Micromechanical devices; Polarization; Resonance; Resonant frequency; Resonator filters; Voltage; Frequency Characteristic; MEMS; Resonator;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering, Telecommunications and Computer Science (TCSET), 2010 International Conference on
Conference_Location
Lviv-Slavske
Print_ISBN
978-966-553-875-2
Electronic_ISBN
978-966-553-901-8
Type
conf
Filename
5445983
Link To Document