DocumentCode

2052716

Title

Epitaxial Lift-off Thin Film GaAs Metal-semicanductor-metal Photodetectors With Back Passivation

Author

Hargis, M.C. ; Brown, J.S. ; Jokerst, N.M.

Author_Institution

Georgia Institute of Technology

fYear

1992

fDate

16-19 Nov 1992

Firstpage

712

Lastpage

713

Keywords

Bandwidth; Capacitance; Dark current; Gallium arsenide; Lithography; Passivation; Photodetectors; Silicon; Substrates; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting

Print_ISBN

0-7803-0526-4

Type

conf

DOI

10.1109/LEOS.1992.694171

Filename

694171