Title :
Epitaxial Lift-off Thin Film GaAs Metal-semicanductor-metal Photodetectors With Back Passivation
Author :
Hargis, M.C. ; Brown, J.S. ; Jokerst, N.M.
Author_Institution :
Georgia Institute of Technology
Keywords :
Bandwidth; Capacitance; Dark current; Gallium arsenide; Lithography; Passivation; Photodetectors; Silicon; Substrates; Transistors;
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
DOI :
10.1109/LEOS.1992.694171
