MEMS structures for pervasive device applications

New MEMS resonating structures using standard CMOS IC processes are proposed and analytical models for proposed structures are established. The static/dynamic analysis for these MEMS resonating structures using developed models and commercially available simulation tools is conducted and results are presented. Theoretical formulas governing the performance critical parameters are derived for the MEMS trench resonators and the results show that the performance of these MEMS resonators as measured by the resonator capacitance ratio improves with shrinking resonator size. These intrinsically low cost and small size devices are a key enabling technology for pervasive device applications