Title :
Models and means of Mems analysis based on stochastic Petri nets
Author :
Vasyl, Teslyuk ; Andriy, Kernytskyy ; Pavlo, Denysyuk ; Alshawabkeh, Hamza Ali Yousef
Abstract :
Models for MEMS structures analysis based on stochastic Petri nets are designed. Results of analysis are presented and features of developed software for information technology of analysis and synthesis of micro electro-mechanical systems are described.
Keywords :
Petri nets; micromechanical devices; stochastic processes; MEMS structures; SPN; mathematical model; microelectromechanical systems; probability; stochastic Petri nets; Equations; Information analysis; Information technology; Microelectromechanical systems; Micromechanical devices; Petri nets; Software tools; Stochastic processes; System recovery; Virtual manufacturing; MEMS; Petri Nets; information technology;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications and Computer Science (TCSET), 2010 International Conference on
Conference_Location :
Lviv-Slavske
Print_ISBN :
978-966-553-875-2
Electronic_ISBN :
978-966-553-901-8
