DocumentCode
2053331
Title
Model of a piezoelectric microaccelerometer based on two piezoelectric plates separated by a layer of polysilicon
Author
Kushnir, Yurij ; Lobur, Mykhaylo
fYear
2010
fDate
23-27 Feb. 2010
Firstpage
51
Lastpage
51
Abstract
This paper presents an alternative design solution for a piezoelectric sensor based on two plates separated by a polysilicon solid body.
Keywords
accelerometers; elemental semiconductors; microsensors; piezoelectric devices; silicon; alternative design solution; piezoelectric microaccelerometer; piezoelectric plates; piezoelectric sensor; polysilicon layer; Capacitive sensors; Dielectrics; Equations; Finite element methods; Mechanical sensors; Micromechanical devices; Piezoelectric effect; Piezoelectric materials; Shape; Voltage; ANSYS; FEM; MEMS; accelerometer; piezoelectric effect;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering, Telecommunications and Computer Science (TCSET), 2010 International Conference on
Conference_Location
Lviv-Slavske
Print_ISBN
978-966-553-875-2
Electronic_ISBN
978-966-553-901-8
Type
conf
Filename
5446011
Link To Document