Title :
MEMS design for an efficient electrostatic energy harvester combined with components of precision mechanics
Author :
Schaufuss, Joerg ; Mehner, Jan
Author_Institution :
Dept. Microsyst. & Precision Eng., Chemnitz Univ. of Technol., Chemnitz, Germany
Abstract :
In this document approaches and results of design optimizations for a high efficient electrostatic energy harvester are presented. The harvester consists of MEMS components and components made of precision mechanics. This combination allows frequency tuning and an output power in the range of microwatts for excitation amplitudes in the range of tenths m/s2.
Keywords :
design engineering; electrostatic devices; energy harvesting; micromechanical devices; MEMS components; design optimizations; electrostatic energy harvesters; excitation amplitudes; frequency tuning; precision mechanics; Capacitance; Electrodes; Electrostatics; Fingers; Layout; Silicon; Springs; Electrostatic energy harvester; MEMS design;
Conference_Titel :
Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on
Conference_Location :
Chemnitz
Print_ISBN :
978-1-4673-1590-6
Electronic_ISBN :
978-1-4673-1589-0
DOI :
10.1109/SSD.2012.6197965
