Title :
Vacuum Packaged Micromachined Gyroscope
Author :
Qiu, Anping ; Su, Yan ; Shi, Qin ; Yang, Bo ; Xu, Yishen
Author_Institution :
Dept. of Instrum. Sci. & Eng., Southeast Univ., Nanjing
Abstract :
In this paper, we present work on the design, fabrication, readout technique and vacuum packaging of z-axis gyroscopes. A vacuum package that houses the gyroscope and its control electronics has bee built and tested. The entire gyroscope package including control electronics is approximately phi42 times 24mm in dimensions. This vacuum packaged gyroscope has a scale factor of 19.8mV/deg/sec with a linear error less than 0.7% for the range of plusmn200deg/s, bias stability of 20deg/hr
Keywords :
gyroscopes; micromechanical devices; packaging; control electronics; readout technique; vacuum packaged micromachined gyroscope; vacuum packaging; z-axis gyroscopes; Consumer electronics; Costs; Electrodes; Electronic equipment testing; Electronics packaging; Fabrication; Fingers; Gyroscopes; Vacuum technology; Wafer scale integration;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location :
Zhuhai
Print_ISBN :
1-4244-0139-9
Electronic_ISBN :
1-4244-0140-2
DOI :
10.1109/NEMS.2006.334769
