IR Imaging at Room-temperature Using Substrate-free Micro-cantilever Array

This paper presents the structure, fabrication and imaging results of a novel optical-readable uncooled infrared detector, in which substrate-free structure is employed to replace the generally used sacrificial layer structure. This substrate-free detector with 100 times 100 pixels can eliminate the loss of 46% of the incident radiation caused by substrate reflecting. The inclination angle of the detector, when absorbing IR radiation, is measured and converted to the gray level imaged by CCD. The results of the thermal image of human body shows the detector is able to sensing the objects at room temperature. The experimental NETD was estimated to be 0.2K