Title :
Preparation and characterization of thin film fluxgate sensors
Author :
Kuchenbrandt, K. ; Ludwig, F. ; Franke, K. ; Schilling, M.
Author_Institution :
Techn. Univ. Braunschweig, Germany
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, we describe the fabrication of micro fluxgate magnetic field sensors in thin film technology.
Keywords :
gold; magnetic field measurement; magnetic sensors; magnetic thin film devices; magnetic thin films; microsensors; sputter deposition; titanium; Ti-Au; micro fluxgate magnetic field sensors; thin film technology; Coils; Geometry; Magnetic cores; Magnetic films; Magnetic noise; Magnetic sensors; Magnetic separation; Sensor phenomena and characterization; Soft magnetic materials; Thin film sensors;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230786
