DocumentCode
2054440
Title
Preparation and characterization of thin film fluxgate sensors
Author
Kuchenbrandt, K. ; Ludwig, F. ; Franke, K. ; Schilling, M.
Author_Institution
Techn. Univ. Braunschweig, Germany
fYear
2003
fDate
March 30 2003-April 3 2003
Abstract
In this paper, we describe the fabrication of micro fluxgate magnetic field sensors in thin film technology.
Keywords
gold; magnetic field measurement; magnetic sensors; magnetic thin film devices; magnetic thin films; microsensors; sputter deposition; titanium; Ti-Au; micro fluxgate magnetic field sensors; thin film technology; Coils; Geometry; Magnetic cores; Magnetic films; Magnetic noise; Magnetic sensors; Magnetic separation; Sensor phenomena and characterization; Soft magnetic materials; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7647-1
Type
conf
DOI
10.1109/INTMAG.2003.1230786
Filename
1230786
Link To Document