Title :
MEMS acoustic emission sensor with mechanical noise rejection
Author :
Auerswald, C. ; Sorger, A. ; Dienel, M. ; Shaporin, A. ; Mehner, J.
Author_Institution :
Microsyst. & Precision Eng., Chemnitz Univ. of Technol., Chemnitz, Germany
Abstract :
The presented paper describes the use of a new approach to develop a high frequency acceleration sensor with good low frequency noise rejection and in contrast to conventional resonant sensors a short settling time, as it is needed for acoustic emission testing.
Keywords :
acceleration measurement; acoustic emission; acoustic emission testing; microsensors; MEMS acoustic emission sensors; acoustic emission testing; high frequency acceleration sensor; mechanical noise rejection; Acceleration; Acoustic emission; Electrodes; Low-frequency noise; Micromechanical devices; Resonant frequency; Sensor systems; Time frequency analysis; Acoustic Emission; MEMS; condition monitoring; mechanical bandpass; structural health;
Conference_Titel :
Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on
Conference_Location :
Chemnitz
Print_ISBN :
978-1-4673-1590-6
Electronic_ISBN :
978-1-4673-1589-0
DOI :
10.1109/SSD.2012.6198017
