CFD analysis of viscous losses in complex microsystems

Author

Sorger, A. ; Freitag, M. ; Shaporin, A. ; Mehner, J.

Author_Institution

Microsyst. & Precision Eng., Chemnitz Univ. of Technol., Chemnitz, Germany

fYear

2012

fDate

20-23 March 2012

Firstpage

1

Lastpage

4

Abstract

This work investigates the possibility to apply general purpose CFD software in order to simulate viscous damping forces in microsystems with arbitrary complex geometries. The paper summarizes various aspects that have to be considered modeling flows and viscous interaction on micrometer scales. Based on the software CFD-ACE+, a general simulation procedure is developed and compared to analytical damping models as well as to measured data. Both comparisons show excellent agreements and finally confirm the presented approach.

Keywords

computational fluid dynamics; damping; geometry; micromechanical devices; micrometry; plastic flow; CFD analysis; CFD-ACE+; arbitrary complex geometries; complex microsystems; viscous damping forces; viscous losses; Analytical models; Atmospheric modeling; Damping; Geometry; Mathematical model; Micromechanical devices; Mirrors; CFD; MEMS; microscale flow; rarefaction; slip-flow; squeezed-film; viscous damping;

fLanguage

English

Publisher

ieee

Conference_Titel

Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on

Conference_Location

Chemnitz

Print_ISBN

978-1-4673-1590-6

Electronic_ISBN

978-1-4673-1589-0

Type

conf

DOI

10.1109/SSD.2012.6198044

Filename

6198044