Title :
CFD analysis of viscous losses in complex microsystems
Author :
Sorger, A. ; Freitag, M. ; Shaporin, A. ; Mehner, J.
Author_Institution :
Microsyst. & Precision Eng., Chemnitz Univ. of Technol., Chemnitz, Germany
Abstract :
This work investigates the possibility to apply general purpose CFD software in order to simulate viscous damping forces in microsystems with arbitrary complex geometries. The paper summarizes various aspects that have to be considered modeling flows and viscous interaction on micrometer scales. Based on the software CFD-ACE+, a general simulation procedure is developed and compared to analytical damping models as well as to measured data. Both comparisons show excellent agreements and finally confirm the presented approach.
Keywords :
computational fluid dynamics; damping; geometry; micromechanical devices; micrometry; plastic flow; CFD analysis; CFD-ACE+; arbitrary complex geometries; complex microsystems; viscous damping forces; viscous losses; Analytical models; Atmospheric modeling; Damping; Geometry; Mathematical model; Micromechanical devices; Mirrors; CFD; MEMS; microscale flow; rarefaction; slip-flow; squeezed-film; viscous damping;
Conference_Titel :
Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on
Conference_Location :
Chemnitz
Print_ISBN :
978-1-4673-1590-6
Electronic_ISBN :
978-1-4673-1589-0
DOI :
10.1109/SSD.2012.6198044
