Optical-fluidic Sensors in LTCC- technology

The successful usage of LTCC modules within micro reaction systems especially with micro fluidic systems is state of the art since a few years. There are mixers, valves, pumpes und different kinds of micro reactors available. But one problem isn´t solved yet. This is the integration of optical windows into LTCC-modules. These windows apply the ability of inline spectroscopic measurement and steering of chemical reactions in LTCC micro reactors. The best would be the integration of available commercially glasses in improved LTCC materials. These conditions allow the development of smart sensors in fluidic LTCC-micro reaction systems with all advantages of the LTCC technology. The main topic of this paper is the integration of optical windows into LTCC- modules. These windows allow a view into or through a fluidic channel or a reaction chamber. Possible applications are the monitoring and investigation of fluids and gasses and their photometric investigation. The shown LTCC modules enhance the application field of the LTCC in the micro reaction technology. A module is presented which allows a view through a reaction channel with the dimensions of 1 mm². Photometric detection of Au nano particles in aqueous solution have been carried out.