DocumentCode :
2056235
Title :
Observer based determination of the crystal diameter in Czochralski crystal growth utilizing algorithmic differentiation
Author :
Winkler, Jan ; Röbenack, Klaus
Author_Institution :
Fak. Elektrotechnik und Informationstechnik, Tech. Univ. Dresden, Dresden, Germany
fYear :
2012
fDate :
20-23 March 2012
Firstpage :
1
Lastpage :
6
Abstract :
This contribution deals with the implementation of a nonlinear state observer (often referred to as smart sensor, soft sensor or virtual sensor) for the reconstruction of not directly measured system quantities in the Czochralski crystal growth process. These quantities are required in automatic control systems used to ensure proper crystal growth. The implementation of the observer on the limited computer hardware available at the growth plants is a challenging task because of the complexity of the underlying mathematical model and the necessity to deal with high order partial and total derivatives of the system equations. Using the method of algorithmic differentiation an efficient way is proposed to implement such an observer. The straightforwardness of the approach is illustrated step by step and experimental results are given.
Keywords :
crystal growth from melt; differentiation; nonlinear control systems; observers; partial differential equations; semiconductor industry; Czochralski crystal growth process; algorithmic differentiation; automatic control system; computer hardware; crystal diameter; growth plant; mathematical model; nonlinear state observer; Boron; Computational modeling; Crystals; Mathematical model; Observers; Software algorithms; Trajectory;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on
Conference_Location :
Chemnitz
Print_ISBN :
978-1-4673-1590-6
Electronic_ISBN :
978-1-4673-1589-0
Type :
conf
DOI :
10.1109/SSD.2012.6198080
Filename :
6198080
Link To Document :
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