DocumentCode :
2056314
Title :
Structuring of carbon nanotubes for field emission based movement sensors
Author :
Loschek, Sergei ; Hermann, Sascha ; Yu, Haibo ; Schulz, Stefan E. ; Gessner, Thomas
Author_Institution :
Center for Microtechnologies, Chemnitz Univ. of Technol., Chemnitz, Germany
fYear :
2012
fDate :
20-23 March 2012
Firstpage :
1
Lastpage :
3
Abstract :
This paper addresses the exploitation of the field emitting properties of carbon nanotubes for movement sensor applications. To utilize this transducer principle a well defined gap between the field emitting carbon nanotubes and the counter electrode must be formed. Three different methods to dissect the dielectrophoretically deposited carbon nanotubes in a reproducible way are presented.
Keywords :
carbon nanotubes; field emission; nanosensors; counter electrode; dielectrophoretically deposited carbon nanotubes; field emitting properties; movement sensor applications; transducer principle; Carbon nanotubes; Electric breakdown; Electrical resistance measurement; Electrodes; Ion beams; Micromechanical devices; Sensors; MEMS/NEMS; carbon nanotubes; dielectrophoresis; field emission; integration; sensor applications;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on
Conference_Location :
Chemnitz
Print_ISBN :
978-1-4673-1590-6
Electronic_ISBN :
978-1-4673-1589-0
Type :
conf
DOI :
10.1109/SSD.2012.6198083
Filename :
6198083
Link To Document :
بازگشت