Photonic Properties of Silicon-on-Glass Nano-Films and its Fabrication

Author

Xiao, Simiao ; Li, Guangbo ; Wang, Fan ; Jiang, Xiaoqing ; Wang, Minghua ; Yang, Jianyi

Author_Institution

Dept. of Inf. Sci. & Electron. Eng. & State Key Lab. of Modern Opt. Instrum., Zhejiang Univ., Hangzhou

fYear

2006

fDate

18-21 Jan. 2006

Firstpage

846

Lastpage

850

Abstract

The photonic properties of the silicon-on-glass (SOG) nano-films are analyzed first and the reason why SOG nano-films are required for the nanophotonics is pointed. Then the method to fabricate silicon-on-glass nano-film materials for the applications of nano photonics is established. Anodic boning and selective etching are employed. SOG-based nano-films are then studied.

Keywords

anodisation; elemental semiconductors; etching; glass; integrated optics; micro-optics; nanotechnology; optical fabrication; optical films; silicon; Si-SiO₂; anodic boning; etching; integrated optics; nanophotonics; silicon-on-glass nanofilms; Fabrication; Nanophotonics; Optical devices; Optical films; Optical interconnections; Optical materials; Optical waveguide theory; Optical waveguides; Rectangular waveguides; Silicon; SOG-based nano-film; anodic boning; fabrication; photonic properties; selective etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Conference_Location

Zhuhai

Print_ISBN

1-4244-0139-9

Electronic_ISBN

1-4244-0140-2

Type

conf

DOI

10.1109/NEMS.2006.334909

Filename

4135082