DocumentCode :
2057496
Title :
A Novel Passive Membrane Pumping Nano Fountain-Pen
Author :
Lee, Young-Kwan ; Lee, Suk-Han ; Kim, Youn-Jea ; Kim, Hunmo
Author_Institution :
Sch. of Mech. Eng., Sungkyunkwan Univ., Suwon
fYear :
2006
fDate :
18-21 Jan. 2006
Firstpage :
1012
Lastpage :
1017
Abstract :
In this paper, flow control of nano fountain pen using active membrane pumping is investigated. DPN (Dip Pen Nano- Lithography) has a shortcoming in which is the need of frequent loading and unloading while coating for broadband patterning. This issue is caused by a limit in quantity of ink, which is tied on the tip surface. The control of fluid injection using active membrane pumping in chambers is the answer of the problem. The flow rates in channels with the presence of capillary force are analyzed including the cantilever deflection and the control of mass flow rates by deflection of membrane. Finally, in this paper, the membrane deflection using a nano indentation equipment has been experimentally examined.
Keywords :
cantilevers; capillarity; indentation; membranes; microchannel flow; nanolithography; nanopatterning; DPN; active membrane pumping; broadband patterning; cantilever deflection; capillary force; channel flow rate; dip pen nanolithography; fluid injection control; membrane deflection; nano fountain-pen; nano indentation equipment; passive membrane pumping; semiconductor circuit; Atomic force microscopy; Atomic measurements; Biomembranes; Coatings; Fluid flow control; Force control; Ink; Nanolithography; Pumps; Reservoirs; Flow control; Nano Fountain Pen Nanolithography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location :
Zhuhai
Print_ISBN :
1-4244-0139-9
Electronic_ISBN :
1-4244-0140-2
Type :
conf
DOI :
10.1109/NEMS.2006.334601
Filename :
4135118
Link To Document :
بازگشت