Title :
Magnetic lithography using flexible magnetic masks: applications to servowriting
Author :
Bandic, Z.Z. ; Albrecht, T.R. ; Xu, H.
Author_Institution :
IBM Almaden Res. Center, San Jose, CA, USA
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, magnetic lithography using flexible magnetic masks and its application to servowriting were investigated. The mask consists of a flexible 127 /spl mu/m thick polyethylene teraphtalate (PET) plastic film patterned with 160-250 nm thick soft magnetic material (FeNiCo, FeCo) and the SEM and MFM images were also obtained in this experiment.
Keywords :
cobalt alloys; ferromagnetic materials; iron alloys; lithography; magnetic force microscopy; magnetic thin films; masks; nickel alloys; plastics; polymer films; scanning electron microscopy; soft magnetic materials; 127 micron; 160 to 250 nm; FeNiCo; MFM; SEM; ferromagnetic materials; magnetic lithography; magnetic masks; polyethylene teraphtalate plastic film; servowriting; soft magnetic materials; Lithography; Magnetic fields; Magnetic force microscopy; Magnetic materials; Magnetic recording; Magnetoelasticity; Optical films; Plastic films; Scanning electron microscopy; Substrates;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230936
