The Effect of Residual Stress on Pull-In Voltage of Fixed-Fixed End Type MEM Switches with Variative Electrostatic Area

Author

Sadeghian, Hamed ; Rezazadeh, Ghader ; Abbaspour, Ebrahim ; Tahmasebi, A. ; Hosainzadeh, I.

Author_Institution

Dept. of Mech. Eng., Urmia Univ.

fYear

2006

fDate

18-21 Jan. 2006

Firstpage

1117

Lastpage

1120

Abstract

In this paper we studied the effect of residual stress on pull-in voltage of fixed-fixed end type MEM switches with variative electrostatic area. We used the distributed model when the electrostatic pressure didn´t apply at the whole of the beam and applied only in the mid-part of the beam. The model uses Euler-Bernoulli beam theory for fixed-fixed end type beams with respect to residual stress due to fabrication process. The derived nonlinear equation has been solved numerically, and has shown that the residual stress changes the pull-in voltage of fixed-fixed end type MEM switches with variative electrostatic area

Keywords

electrostatic devices; internal stresses; microswitches; nonlinear equations; Euler-Bernoulli beam theory; distributed model; electrostatic pressure; fabrication process; fixed-fixed end type MEM switches; fixed-fixed end type beams; nonlinear equation; pull-in voltage; residual stress effects; variative electrostatic area; Analytical models; Circuit simulation; Coupling circuits; Electrostatics; Micromechanical devices; Power system modeling; Residual stresses; Switches; Systems engineering and theory; Voltage; Electrostatic pressure; MEMS; Pull-in voltage; Residual Stress; Varying Section;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Conference_Location

Zhuhai

Print_ISBN

1-4244-0139-9

Electronic_ISBN

1-4244-0140-2

Type

conf

DOI

10.1109/NEMS.2006.334644

Filename

4135143