Micro/nanofabrication of two and three dimensional structures by two-photon polymerization

Author

Duan, Xuan-Ming ; Sun, Hong-Bo ; Kaneko, Koshiro ; Nakamura, Atsusbi ; Shoji, Satoru ; Kawata, Satoshi

Author_Institution

CREST, Japan Sci. & Technol. Corp., Suita, Japan

Volume

2

fYear

2003

fDate

12-14 Aug. 2003

Firstpage

498

Abstract

Femtosecond infrared laser pulses are useful for laser micro/nanofabrication of two and three dimensional (2D & 3D) structures through multiphoton process. 2D & 3D polymeric structures were fabricated by two-photon polymerization. These features were produced by designing multibeam interference and writing patterns. The influence of post-developing process, which leads to a dramatic change in 2D rod array, also be discussed. These methods provide simple and rapid approaches for creating templates with designed 2D & 3D structure in micro/nanometer scales.

Keywords

laser materials processing; nanoparticles; nanotechnology; optical polymers; particle reinforced composites; photonic crystals; polymerisation; scanning electron microscopy; two-photon processes; 2D polymeric structure; 3D polymeric structures; designing multibeam interference; femtosecond infrared laser pulses; laser microfabrication; laser nanofabrication; multiphoton process; post-developing process; three dimensional structures; two dimensional structures; two-photon polymerization; Chemical lasers; Laser beams; Magnetic materials; Nanofabrication; Nanoparticles; Optical attenuators; Optical materials; Polymers; Resins; Ultrafast optics;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on

Print_ISBN

0-7803-7976-4

Type

conf

DOI

10.1109/NANO.2003.1230955

Filename

1230955