Title :
Characterization of a submicron PMOS in mixer circuits
Author :
Yeap, Kim Ho ; Ahmad, Ibrahim ; Rizman, Zairi Ismael ; Chew, Kerlit ; Chong, Kok Hen ; Yong, Yun Thung
Author_Institution :
Fac. of Eng. & Green Technol., Tunku Abdul Rahman Univ., Kampar, Malaysia
Abstract :
In this paper, we investigate the properties of a submicron pMOS with a single layer of metallization. The fabrication process and electrical characterization of the device were simulated using the SILVACO TCAD tools. We have applied constant field scaling on the effective channel length, the density of ion implantation for threshold voltage adjustment, and gate oxide thickness. To suppress short channel effects, we have also applied retrograde well implantation, Shallow Trench Isolation (STI), sidewall spacer deposition, silicide formation, and Lightly Doped Drain implantation in our process simulation. We have validated the electrical performance of the device by plotting and analyzing the ID-Vg relationship.
Keywords :
MOSFET; ion implantation; mixers (circuits); semiconductor device metallisation; SILVACO TCAD tools; constant field scaling; effective channel length; electrical characterization; fabrication process; gate oxide thickness; ion implantation density; light doped drain implantation; metallization; mixer circuits; shallow trench isolation; short channel effects; sidewall spacer deposition; submicron PMOS characterization; threshold voltage adjustment; Annealing; Boron; Logic gates; Metallization; Silicides;
Conference_Titel :
Sustainable Utilization and Development in Engineering and Technology (STUDENT), 2010 IEEE Conference on
Conference_Location :
Petaling Jaya
Print_ISBN :
978-1-4244-7504-9
DOI :
10.1109/STUDENT.2010.5686992