Custom fabrication of freestanding and suspended three-dimensional polymer structures

An atomic force microscope (AFM) is used as a micromanipulator to fabricate freestanding micron diameter wires and bridges in a matter of minutes by pulling polymer materials into fibers. The fabrication procedure appears to have significant application in easier and more rapid prototyping of micro-, nano- and MEMS devices. While fiber pulling technology has advanced to high degrees of perfection, our process represents the first time that a nano-positioning tool has been used to fabricate three-dimensional microstructures with a degree of flexibility and simplicity far exceeding traditional MEMS and microfabrication processing methods. Preliminary efforts at demonstrating the use of the fibers in device fabrication and applications are also presented.