Impact of Thermal Behavior on ZRO in an Electro-magnetically Driven Microgyroscope

In this paper, the CFD approach is used to simulate the thermal behavior in an electromagnetically driven microgyroscope. The driving wires, in which the alternating current flows, are treated as the heat sources. For a glass-silicon-glass device structure, it is found that the differences of the temperature, pressure and velocity along the driving direction surrounding the proof masses increase as the gap height between the proof mass and top glass becomes smaller. These differences are expected to possibly enhance the impact of any imperfection led by MEMS processes or designs on the ZRO of our tuning-fork type microgyroscope with high Q-factors, which has been experimentally verified. A device with 200mum gap gives a two-third offset down compared with that of its counterpart with 50mum gap