DocumentCode :
2059066
Title :
Effect of photon irradiation on SBT films
Author :
Ito, Takatoshi ; Nonaka, Hiroki ; Ohki, Yoshimichi ; Seol, Kwang Soo ; Choi, In-Hoon ; Kim, Yong-Tea
Author_Institution :
Waseda Univ., Tokyo, Japan
fYear :
2001
fDate :
2001
Firstpage :
661
Lastpage :
664
Abstract :
Simultaneous laser irradiation during thermal annealing is effective to lower the crystallization temperature of the perovskite structure. However, the surface of a Sr2Bi2Ta2O9 (SBT) film with the perovskite structure obtained by laser irradiation is not as smooth as one obtained by thermal annealing. In order to fabricate SBT films that can be used for ferroelectric memories, we need to reduce the surface damage. In the present research, the effect of photon irradiation on the surface damage of SBT is investigated
Keywords :
annealing; bismuth compounds; crystallisation; ferroelectric thin films; laser beam effects; strontium compounds; SBT film; Sr2Bi2Ta2O9; crystallization; ferroelectric memory; laser irradiation; perovskite structure; photon irradiation; surface damage; thermal annealing; Annealing; Bismuth; Crystallization; Ferroelectric films; Ferroelectric materials; Furnaces; Infrared heating; Optical pulses; Substrates; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Insulating Materials, 2001. (ISEIM 2001). Proceedings of 2001 International Symposium on
Conference_Location :
Himeji
Print_ISBN :
4-88686-053-2
Type :
conf
DOI :
10.1109/ISEIM.2001.973761
Filename :
973761
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2059066
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