Title :
Experiment Research on Multi-Folded-Suspension Resonators
Author :
Zhao, Jiang M. ; Chen, Xiao Y. ; Zhang, Alice H X ; Zheng, Yan P.
Author_Institution :
Dept. of Mech. Autom., Shanghai Univ.
Abstract :
Experiment researches on multi-folded-suspension resonators are made by four kinds of resonators with different structure parameters. It is found that the resonance amplitude can be about 10 micron in open air by a peak to peak 48V AC driving voltage without DC bias voltages. And a non-transverse resonance has been observed in the experiment. It is found that the frequencies of AC voltage are just a half of the resonators´ natural frequencies when the resonances take place without DC offset voltages. And the resonance amplitude is the second power function of the AC voltage. The experiment results reveal that the transverse resonance frequency meets the ANSYS simulation result very well, but the non-transverse resonance frequencies does not agree with the results by the ANSYS simulation results
Keywords :
micromechanical resonators; suspensions (mechanical components); ANSYS simulation; driving voltage; multi-folded-suspension resonators; transverse resonance frequency; Automation; Dielectric constant; Differential equations; Electrostatics; Fingers; Resonance; Resonant frequency; Suspensions; Systems engineering and theory; Voltage; Experiment; Multi-folded-suspension; Resonance Amplitude; Resonance Frequency; Resonators;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location :
Zhuhai
Print_ISBN :
1-4244-0139-9
Electronic_ISBN :
1-4244-0140-2
DOI :
10.1109/NEMS.2006.334739
