Fabrication and characterization of AFM golden microcantilevers and measurement of small electromagnetic forces

Author

Djuric, Z. ; Jokic, I. ; Frantlovic, M. ; Randjelovic, D. ; Radovic, D. Vasiljevic ; Smiljanic, M. ; Lazic, Z.

Author_Institution

Inst. of Microelectron. Technol. & Single Crystals, Univ. of Belgrade, Belgrade

fYear

2008

fDate

11-14 May 2008

Firstpage

363

Lastpage

366

Abstract

This paper presents results of research oriented towards developing a method for measurement of small electromagnetic forces using atomic force microscope (AFM). The method is based on the measurement of cantilever deflection due to influence of Lorentz force and enables determination of magnetic force and magnetic induction of various magnets and conductors carrying electric current. Design and fabrication of a cantilevers with "U" and "V" shape is presented. A homogenous composition of the microcantilever made of a conductive material (gold) is chosen in order to avoid the adverse bimaterial effect. Preliminary experimental results obtained by measuring interaction between a permanent magnet and current carrying cantilever are given.

Keywords

atomic force microscopy; cantilevers; conducting materials; electromagnetic induction; gold; magnetic field measurement; magnetic forces; micromechanical devices; permanent magnets; AFM golden microcantilevers; Lorentz force; adverse bimaterial effect; atomic force microscope; cantilever deflection; conductive material; conductors; electromagnetic forces measurement; magnetic force; magnetic induction; permanent magnet; Atomic force microscopy; Atomic measurements; Conducting materials; Current measurement; Electric variables measurement; Electromagnetic forces; Electromagnetic measurements; Fabrication; Force measurement; Lorentz covariance;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics, 2008. MIEL 2008. 26th International Conference on

Conference_Location

Nis

Print_ISBN

978-1-4244-1881-7

Electronic_ISBN

978-1-4244-1882-4

Type

conf

DOI

10.1109/ICMEL.2008.4559297

Filename

4559297