Nano-Fabricated Mesoporous Pt electrode on Silicon for CMOS Integrated Electrochemical Sensor Applications

Most of the biosensors are based on the enzymatic electrochemical analysis and are disposable due to the use of the enzymes that are living creatures. Thus, these are limited to the in-vivo and handheld continuous monitoring sensor system applications. In this paper, a nano-hole (mesoporous) arrayed Pt electrode is investigated for developing the non-disposable electrochemical sensors without using any enzymes, which are also integrated with silicon CMOS read out circuitry. In comparison of the mesoporous Pt electrode and the plane (non-treated) Pt electrode, the current responses of mesoporous Pt electrode and the plane Pt electrode are approximately 4.62 muA/mm² and 9.91 nA/mm² respectively in 10 mM glucose solution. The fabricated mesoporous Pt electrode was hardly influenced by the interrupt material as the ascorbic acid. This result shows the nano-fabricated mesoporous Pt electrode is promising for CMOS integrated non-disposable sensor applications