Title :
Impurity-free vacancy disordering of quantum wells and quantum dots for optoelectronic/photonic integrated circuits
Author :
Fu, L. ; Lever, P. ; Gareso, P.L. ; Buda, M. ; Tan, H.H. ; Jagadish, C. ; Reece, P. ; Gal, M.
Author_Institution :
Dept. of Electron. Mat. Eng., Australian Nat. Univ., Canberra, ACT, Australia
Abstract :
Impurity free vacancy disordering (JFVD) is one of the most promising interdiffusion techniques for device application which has been studied extensively in recent years. In this work, we review the method of applying different dielectric capping layers for promoting or suppressing IFVD in both quantum well and quantum dot structures. The mechanism of interdiffusion process based on group HI vacancy generation and diffusion was introduced and discussed to explain the different effects created by the capping layers. It is demonstrated that using this method, different band gap energies across the same wafer can be achieved, which is essential for optoelectronic/photonic integrated circuits.
Keywords :
chemical interdiffusion; energy gap; integrated optoelectronics; reviews; semiconductor quantum dots; semiconductor quantum wells; vacancies (crystal); band gap energies; dielectric capping layers; impurity-free vacancy disordering; interdiffusion; optoelectronic integrated circuits; photonic integrated circuits; quantum dots; quantum wells; review; Atomic layer deposition; Dielectrics; Gallium arsenide; Impurities; Indium gallium arsenide; Photonic band gap; Photonic integrated circuits; Quantum dots; Substrates; US Department of Transportation;
Conference_Titel :
Semiconducting and Insulating Materials, 2004. SIMC-XIII-2004. 13th International Conference on
Print_ISBN :
0-7803-8668-X
DOI :
10.1109/SIM.2005.1511397