DocumentCode :
2060266
Title :
Reliability acceleration model of stacked ZrO2-Al2O3-ZrO2 MIM capacitor with cylinder type
Author :
Seo, Jae Yong ; Seok, Jung Eun ; Kim, Hyun Joo ; Kim, Hyun Jung ; Park, Hong Sik ; Jeon, Jae Eun ; Lee, Won Shik
Author_Institution :
Memory Div., Samsung Electron., Hwasung
fYear :
2008
fDate :
11-14 May 2008
Firstpage :
521
Lastpage :
524
Abstract :
An exact lifetime extrapolation models of ZrO2-Al2O3-ZrO2 (ZAZ) stack capacitor with metal-insulator-metal (MIM) structure was studied in this paper. From the extensive long-term test result (~ 7.5 months) it was found that the power-law model is suitable as a exact lifetime extrapolation model for ZAZ dielectric reliability.
Keywords :
MIM devices; aluminium compounds; capacitors; extrapolation; reliability; zirconium compounds; MIM capacitor reliability; ZrO2-Al2O3-ZrO2; acceleration model; exact lifetime extrapolation models; metal-insulator-metal structure; power-law model; Acceleration; Microelectronics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronics, 2008. MIEL 2008. 26th International Conference on
Conference_Location :
Nis
Print_ISBN :
978-1-4244-1881-7
Electronic_ISBN :
978-1-4244-1882-4
Type :
conf
DOI :
10.1109/ICMEL.2008.4559337
Filename :
4559337
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2060266
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