Fabrication of Hexagonal-Prism Microstructure using Monolithic Etching Process

In this paper, we propose a novel method to fabricate three-dimensional hexagonal-like fillister structures on lang110rang silicon wafer by precise bulk etching in micro electro mechanical systems (MEMS). Photo mask is designed as a 50 times 50 array of equilateral parallelograms having side length of 80 mum. The 40 wt% KOH solution is used as the etchant. The created structure is used as the mold to cast the PDMS three-dimensional hexagonal-like structures. The created microstructure is believed to have great potential in developing high performance devices in optical, heat-exchanging, and biochemical applications