Title :
How to monitor Metal-Insulator-Metal (MIM) capacitors dielectric reliability
Author :
Martinez, V. ; Besset, C. ; Monsieur, F. ; Ney, D. ; Montes, L. ; Ghibaudo, G.
Author_Institution :
Reliability Team, ST Microelectron., Crolles
Abstract :
In this paper, a new method to monitor MIM capacitors dielectric reliability has been developed in order to avoid misinterpretation due to self-heating, fringe effects and dielectric thickness spread. Original test structures have been designed with the aim of emphasize, model and thus correct these effects.
Keywords :
MIM devices; capacitors; reliability; MIM capacitors; dielectric reliability; dielectric thickness spread; effects; metal-insulator-metal capacitors; self-heating; Dielectrics; MIM capacitors; Metal-insulator structures; Monitoring;
Conference_Titel :
Microelectronics, 2008. MIEL 2008. 26th International Conference on
Conference_Location :
Nis
Print_ISBN :
978-1-4244-1881-7
Electronic_ISBN :
978-1-4244-1882-4
DOI :
10.1109/ICMEL.2008.4559341
