Fabrication Improvement of the Grating Light Modulator

Author

Zhang, Zhihai ; Huang, Shanglian ; Wu, Yi ; Yan, Xu ; Zhang, Jie ; Fu, Hongqiao

Author_Institution

Dept. of Opt.-Electron. Eng., Chongqing Univ.

fYear

2006

fDate

18-21 Jan. 2006

Firstpage

1483

Lastpage

1486

Abstract

A new type of grating light modulator (GLM) for display application has been presented. It has the advantages of the MOEMS modulator. Meanwhile, it is easy for integration of array device and reduces the fabrication complication. The modulation principle and the fabrication results are given. Some methods to enhance the quality of the GLM are proposed. To enlarge the effective optical area, the central part of GLM is thickened. And to improve the surface quality, the evaporated Al film is adopted instead of sputtered Al. In correspond to these changes, the changed fabrication flow are shown

Keywords

aluminium; diffraction gratings; micro-optomechanical devices; optical modulation; vacuum deposition; MOEMS modulator; aluminium film; display application; fabrication improvement; grating light modulator; microoptoelectromechanical systems; surface quality; Diffraction gratings; High speed optical techniques; Optical arrays; Optical device fabrication; Optical diffraction; Optical films; Optical modulation; Optical signal processing; Optical surface waves; Surface topography; GLM; MOEMS; fabrication; grating light modulator;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Conference_Location

Zhuhai

Print_ISBN

1-4244-0139-9

Electronic_ISBN

1-4244-0140-2

Type

conf

DOI

10.1109/NEMS.2006.334812

Filename

4135224