Design MEMS Actuators with Topology Optimization Method

Author

Zuo, Kongtian ; Zhao, Yudong ; Xie, Yongjun ; Chen, Liping

Author_Institution

State Key Lab. of Automotive Safety & Energy, Tsinghua Univ., Beijing

fYear

2006

fDate

18-21 Jan. 2006

Firstpage

1517

Lastpage

1522

Abstract

Topology optimization method is a novel design method for MEMS actuators. In this paper, a multi-objective design method is introduced into topology optimization for MEMS actuators. Some important factors for multi-objective design of MEMS actuators are deeply researched. A multi-objective topology optimization method based on minimal structural compliance and maximal structural output displacement of MEMS actuators is proposed and the corresponding governing equation for topology optimization is established. A sensitivity analysis of adjoint method is proposed to analyze topology optimization design of multi-objective MEMS actuators. Meanwhile, GCMMA (globally convergent version of the method of moving asymptotes) algorithm is used in optimization. Two numerical examples of MEMS actuators verified the effectiveness of above theory and algorithm

Keywords

microactuators; optimisation; sensitivity analysis; GCMMA; MEMS actuators; adjoint method; globally convergent version of the method of moving asymptotes algorithm; microelectromechanical systems; multiobjective design; sensitivity analysis; topology optimization method; Actuators; Capacitive sensors; Design methodology; Design optimization; Equations; Interpolation; Micromechanical devices; Optimization methods; Sensitivity analysis; Topology; MEMS actuator; multi-objective design; optimization algorithm; sensitivity analysis; topology optimization;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Conference_Location

Zhuhai

Print_ISBN

1-4244-0139-9

Electronic_ISBN

1-4244-0140-2

Type

conf

DOI

10.1109/NEMS.2006.334820

Filename

4135232