Title :
Design MEMS Actuators with Topology Optimization Method
Author :
Zuo, Kongtian ; Zhao, Yudong ; Xie, Yongjun ; Chen, Liping
Author_Institution :
State Key Lab. of Automotive Safety & Energy, Tsinghua Univ., Beijing
Abstract :
Topology optimization method is a novel design method for MEMS actuators. In this paper, a multi-objective design method is introduced into topology optimization for MEMS actuators. Some important factors for multi-objective design of MEMS actuators are deeply researched. A multi-objective topology optimization method based on minimal structural compliance and maximal structural output displacement of MEMS actuators is proposed and the corresponding governing equation for topology optimization is established. A sensitivity analysis of adjoint method is proposed to analyze topology optimization design of multi-objective MEMS actuators. Meanwhile, GCMMA (globally convergent version of the method of moving asymptotes) algorithm is used in optimization. Two numerical examples of MEMS actuators verified the effectiveness of above theory and algorithm
Keywords :
microactuators; optimisation; sensitivity analysis; GCMMA; MEMS actuators; adjoint method; globally convergent version of the method of moving asymptotes algorithm; microelectromechanical systems; multiobjective design; sensitivity analysis; topology optimization method; Actuators; Capacitive sensors; Design methodology; Design optimization; Equations; Interpolation; Micromechanical devices; Optimization methods; Sensitivity analysis; Topology; MEMS actuator; multi-objective design; optimization algorithm; sensitivity analysis; topology optimization;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location :
Zhuhai
Print_ISBN :
1-4244-0139-9
Electronic_ISBN :
1-4244-0140-2
DOI :
10.1109/NEMS.2006.334820
