Title :
Impact of the Casimir force on movable-dielectric RF MEMS varactors
Author :
De Los Santos, Hector J.
Author_Institution :
NanoMEMS Res. LLC, Irvine, CA, USA
Abstract :
An analysis of factors affecting the tuning range of movable-dielectric RF MEMS varactors, in particular, lateral and vertical spring stiffness and plate-slab gap asymmetry, is conducted. The analysis is based upon simple analytical models for spring and electrostatic forces, and on Lifshitz´s formula for molecular interaction forces. It is found that, due to the large sensitivity of Casimir forces to asymmetry, these are very likely to play a greater role than spring vertical stiffness, in limiting the varactor tuning range.
Keywords :
Casimir effect; dielectric materials; electrostatics; impact (mechanical); micromechanical devices; sensitivity; varactors; Casimir force; Lifshitz´s formula; dielectric RF MEMS varactors; electrostatic forces; impact; molecular interaction forces; plate slab gap asymmetry; sensitivity; spring forces; spring stiffness; spring vertical stiffness; varactor tuning range; Capacitance; Casimir effect; Dielectric constant; Dielectric devices; Electrostatics; Radiofrequency microelectromechanical systems; Slabs; Springs; Varactors; Voltage;
Conference_Titel :
Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on
Print_ISBN :
0-7803-7976-4
DOI :
10.1109/NANO.2003.1231061
