Title :
Surface structure and optical properties of nanostructured Y2O3 films
Author :
Mudavakkat, Vikas H. ; Atuchin, Viktor V. ; Pokrovsky, Lev D. ; Kruchinin, Vladimir N. ; Ramana, C.V.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Texas at El Paso, El Paso, TX, USA
Abstract :
Nanostructured Y2O3 films with an average crystallite-size ranging from 5 to 40 nm were grown by sputter-deposition onto Si(100) substrates. The surface structure and optical properties of Y2O3 films were evaluated. The size-effects were significant on the optical constants and their dispersion profiles of Y2O3 films.
Keywords :
grain size; nanofabrication; nanostructured materials; refractive index; size effect; sputter deposition; surface morphology; yttrium compounds; Si; Y2O3; crystallite size; dispersion profiles; grain size; nanostructured Films; optical constants; optical properties; size 5 nm to 40 nm; size effects; sputter deposition; surface structure; Optical amplifiers; Optical films; Optical reflection; Optical refraction; Optical variables control; Yttrium oxide; optical properties; surface structure; thin films;
Conference_Titel :
Fundamental Problems of Micro/Nanosystems Technologies (MNST), 2010 IEEE 2nd Russia School and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-5962-9
Electronic_ISBN :
978-1-4244-5963-6
DOI :
10.1109/MNST.2010.5687126
