• DocumentCode
    2061826
  • Title

    Fabrication of multilayer crystalline rib waveguides by a combined multi-step Pulsed Laser Deposition/precision machining technique

  • Author

    Sloyan, Katherine A. ; Carpenter, Lewis G. ; May-Smith, Timothy C. ; Holmes, Christopher ; Gates, James C. ; Smith, Peter G R ; Eason, Robert W.

  • Author_Institution
    Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
  • fYear
    2011
  • fDate
    22-26 May 2011
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    The authors present a technique that combines PLD with precision sawing (used previously to machine silica-on-silicon cantilevers) to create multilayer crystalline garnet ribs quickly and easily.
  • Keywords
    garnets; optical fabrication; optical multilayers; optical waveguides; pulsed laser deposition; rib waveguides; sawing; combined multistep pulsed laser deposition; multilayer crystalline garnet ribs; multilayer crystalline rib waveguides; precision machining; precision sawing; silica-on-silicon cantilevers; Optical device fabrication; Optical diffraction; Optical films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
  • Conference_Location
    Munich
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0533-5
  • Electronic_ISBN
    Pending
  • Type

    conf

  • DOI
    10.1109/CLEOE.2011.5942740
  • Filename
    5942740