DocumentCode :
2062857
Title :
Second harmonic generation in GaP nanopillars
Author :
Sanatinia, R. ; Swillo, M. ; Anand, S.
Author_Institution :
Sch. of Inf. & Commun. Technol., R. Inst. of Technol., Kista, Sweden
fYear :
2011
fDate :
22-26 May 2011
Firstpage :
1
Lastpage :
1
Abstract :
In this work periodic arrays of GaP nanopillars are fabricated on (100) undoped GaP substrate by colloidal lithography and dry etching using Ar/Cl2 chemistry. Nanopillars with different heights, shapes and spatial distance were fabricated by this method.
Keywords :
III-V semiconductors; gallium compounds; integrated optics; nanophotonics; nanostructured materials; optical harmonic generation; photolithography; GaP; GaP nanopillars; colloidal lithography; dry etching; periodic arrays; second harmonic generation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
ISSN :
Pending
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
Type :
conf
DOI :
10.1109/CLEOE.2011.5942784
Filename :
5942784
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2062857
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