• DocumentCode
    2063750
  • Title

    Physically micromachined silica-on-silicon integrated corner mirrors

  • Author

    Carpenter, Lewis G. ; Rogers, Helen L. ; Holmes, Christopher ; Gates, James C. ; Smith, Peter G R

  • Author_Institution
    Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
  • fYear
    2011
  • fDate
    22-26 May 2011
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    This experiment demonstrates an alternative method of fabricating mirrors on a silica-on-silicon substrate. The method employs the complimentary techniques of physical micromachining and direct UV writing, both provide rapid prototyping outside the cleanroom environment.
  • Keywords
    integrated optics; micromachining; mirrors; optical fabrication; silicon compounds; SiO2-Si; direct writing; integrated corner mirrors; physically micromachined silica-on-silicon substrate;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
  • Conference_Location
    Munich
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0533-5
  • Electronic_ISBN
    Pending
  • Type

    conf

  • DOI
    10.1109/CLEOE.2011.5942821
  • Filename
    5942821
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2063750