Title :
Physically micromachined silica-on-silicon integrated corner mirrors
Author :
Carpenter, Lewis G. ; Rogers, Helen L. ; Holmes, Christopher ; Gates, James C. ; Smith, Peter G R
Author_Institution :
Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
Abstract :
This experiment demonstrates an alternative method of fabricating mirrors on a silica-on-silicon substrate. The method employs the complimentary techniques of physical micromachining and direct UV writing, both provide rapid prototyping outside the cleanroom environment.
Keywords :
integrated optics; micromachining; mirrors; optical fabrication; silicon compounds; SiO2-Si; direct writing; integrated corner mirrors; physically micromachined silica-on-silicon substrate;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
DOI :
10.1109/CLEOE.2011.5942821
