Fabrication of CNT nanosensors by combining micro-robotic spotting and DEP technologies

Author

Lai, King W C ; Fung, Carmen K M ; Li, Wen J.

Author_Institution

Centre for Micro & Nano Syst., Chinese Univ., Hong Kong, China

fYear

2005

fDate

12-15 June 2005

Firstpage

30

Lastpage

35

Abstract

An automated carbon nanotubes (CNTs) microspotting system was developed for rapid and batch assembly of bulk multi-walled carbon nanotubes (MWNT) based nanosensors. By combining dielectrophoretic (DEP) and microspotting technique, MWNT bundles were successfully and repeatably manipulated between arrays of micro-fabricated electrodes. Preliminary experimental results showed that two different spotting methods were successful in forming CNTs between microelectrodes and the time required to form one CNT sensor was less than 1 second. This feasible batch manufacturable method dramatically reduces production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT and other nanowire based devices.

Keywords

batch processing (industrial); carbon nanotubes; nanotechnology; robots; CNT nanosensor; DEP technology; automated carbon nanotube; batch manufacturing; dielectrophoretic technique; microfabricated electrode; microrobotic spotting; microspotting system; microspotting technique; multiwalled carbon nanotube; nano batch fabrication; nano manufacturing; nano sensing device; nanowire based device; production cost reduction; Assembly systems; Carbon nanotubes; Costs; Dielectrophoresis; Electrodes; Fabrication; Manufacturing automation; Microelectrodes; Nanoscale devices; Production;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Robotics and its Social Impacts, 2005. IEEE Workshop on

Print_ISBN

0-7803-8947-6

Type

conf

DOI

10.1109/ARSO.2005.1511615

Filename

1511615