DocumentCode :
2064536
Title :
Titanium free optical waveguides in lithium niobate produced by Etching During Indiffusion of titanium (EDIT)
Author :
Crasto, T. ; Sivan, V. ; Nguyen, T. ; Mitchell, A.
Author_Institution :
Centre for Ultrahigh-Bandwidth Devices for Opt. Syst. (CUDOS), Melbourne, VIC, Australia
fYear :
2011
fDate :
22-26 May 2011
Firstpage :
1
Lastpage :
1
Abstract :
Numerous techniques to fabricate optical waveguides in LiNbO3 have been reported, which include Li2O out diffusion, metal in-diffusion, ion exchange, proton exchange, strain induced waveguides, ion implantation/irradiation, using the photo-refractive effect and ultrafast or UV laser writing. We have recently reported a technique to surface machine LiNbO3 etching during the indiffusion of Ti (EDIT), where one X cut sample is prepared with a patterned film of titanium. This is then placed in contact with another unprocessed X-cut sample and the pair is annealed in a wet oxygen atmosphere. After annealing, the originally unpatterned wafer is etched corresponding to the Ti patterns on the other wafer. In this work, we report on the observation of waveguiding in LiNbO3 that has been EDIT patterned.
Keywords :
annealing; diffusion; high-speed optical techniques; ion exchange; ion implantation; laser beam etching; lithium compounds; optical fabrication; optical waveguides; photorefractive effect; LiNbO3; UV laser writing; annealing; indiffusion; ion exchange; ion implantation/irradiation; lithium niobate; metal in-diffusion; optical waveguides; photo-refractive effect; proton exchange; strain induced waveguides; surface machine etching; titanium; ultrafast writing; Lithium niobate; Optical device fabrication; Optical fibers; Optical imaging; Optical polarization; Optical reflection;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
ISSN :
Pending
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
Type :
conf
DOI :
10.1109/CLEOE.2011.5942853
Filename :
5942853
Link To Document :
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