• DocumentCode
    2064563
  • Title

    IC failure analysis tools and techniques-magic, mystery, and science

  • Author

    Soden, Jerry M. ; Anderson, Richard E. ; Henderson, Christopher L.

  • Author_Institution
    Failure Anal. Dept., Sandia Nat. Labs., Albuquerque, NM, USA
  • fYear
    1996
  • fDate
    20-25 Oct 1996
  • Firstpage
    935
  • Abstract
    This review includes a discussion of the advances being made to meet the challenges presented by state-of-the-art IC and packaging technologies, since these provide the motivation and direction for the future of FA. New capabilities are required for ICs with features such as additional interconnection layers, power distribution planes, or flip chip packaging that reduce or prevent the use of conventional methods without destructive deprocessing. To support improved time to market and yield enhancement, the industry needs diagnostic techniques that provide logical and physical localization in real time during production testing
  • Keywords
    failure analysis; flip-chip devices; integrated circuit interconnections; integrated circuit packaging; integrated circuit testing; integrated circuit yield; production testing; IC failure analysis; diagnostic techniques; failure analysis tools; flip chip packaging; interconnection layers; packaging technologies; power distribution planes; production testing; time to market; yield enhancement; Atomic force microscopy; Electron beams; Electron optics; Failure analysis; Integrated circuit packaging; Integrated circuit testing; Laboratories; Optical microscopy; Photonic integrated circuits; Probes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Test Conference, 1996. Proceedings., International
  • Conference_Location
    Washington, DC
  • ISSN
    1089-3539
  • Print_ISBN
    0-7803-3541-4
  • Type

    conf

  • DOI
    10.1109/TEST.1996.557164
  • Filename
    557164