Title :
Nano-optical gratings for integrated laser interferometer arrays
Author :
Michaelis, D. ; Oliva, M. ; Benkenstein, T. ; Harzendorf, T. ; Matthes, A. ; Zeitner, U.
Author_Institution :
Fraunhofer Inst. for Appl. Opt. & Precision Eng., Jena, Germany
Abstract :
In this contribution we show that binary nano-optical gratings in the resonance domain are ideal elements to build up such integrated interferometers. By means of symmetry considerations the grating´s requirements for an ideal operation of the interferometer are determined. Utilizing the resonance behaviour of such nano-structures an interferometer operation close to the theoretical limits is reachable. A modal analysis reveals the basic effects causing the special responses of the gratings. The gratings are fabricated by electron-beam lithography and accompanied technology.
Keywords :
diffraction gratings; electron beam lithography; light interferometers; nanophotonics; electron-beam lithography; integrated laser interferometer arrays; nano-optical gratings; nanostructures; resonance domain;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
DOI :
10.1109/CLEOE.2011.5942903