DocumentCode
2065746
Title
Nano-optical gratings for integrated laser interferometer arrays
Author
Michaelis, D. ; Oliva, M. ; Benkenstein, T. ; Harzendorf, T. ; Matthes, A. ; Zeitner, U.
Author_Institution
Fraunhofer Inst. for Appl. Opt. & Precision Eng., Jena, Germany
fYear
2011
fDate
22-26 May 2011
Firstpage
1
Lastpage
1
Abstract
In this contribution we show that binary nano-optical gratings in the resonance domain are ideal elements to build up such integrated interferometers. By means of symmetry considerations the grating´s requirements for an ideal operation of the interferometer are determined. Utilizing the resonance behaviour of such nano-structures an interferometer operation close to the theoretical limits is reachable. A modal analysis reveals the basic effects causing the special responses of the gratings. The gratings are fabricated by electron-beam lithography and accompanied technology.
Keywords
diffraction gratings; electron beam lithography; light interferometers; nanophotonics; electron-beam lithography; integrated laser interferometer arrays; nano-optical gratings; nanostructures; resonance domain;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location
Munich
ISSN
Pending
Print_ISBN
978-1-4577-0533-5
Electronic_ISBN
Pending
Type
conf
DOI
10.1109/CLEOE.2011.5942903
Filename
5942903
Link To Document