DocumentCode
2066464
Title
Reliability characterization and process optimization of Ni-based microinsert interconnections for flip chip die on wafer attachment
Author
Boutry, H. ; Brun, J. ; Nowodzinski, A. ; Sillon, N. ; Depoutot, F. ; Dubois-Bonvalot, B. ; Schmidt, C. ; Simon, M. ; Altmann, F.
Author_Institution
CEA-LETI Minatec, Grenoble
fYear
2009
fDate
26-29 May 2009
Firstpage
74
Lastpage
79
Abstract
In many complex systems under development, the cost of integration and the compromises in performance that can result from the integration process can become prohibitive. Therefore, the establishment of a technology which enables the system level integration of devices from different technological families at the package level can become very attractive. In particular, since each component can be built in its optimum technology flow and interconnections within the package tend to be very short, very high performance can be achieved. The work to be presented in this paper describes direct and electrical reliability measurements of test structures used to optimise the electrical performance of micro insert based interconnection system as a function of flip chip mounting parameters. Micro-inserts have a great deal of potential for the face to face interconnection of stacked systems in three-dimensional integration technologies.
Keywords
flip-chip devices; integrated circuit interconnections; integrated circuit metallisation; integrated circuit reliability; 3D integration technology; NiJkJk; flip chip die; microinsert interconnection; system level integration; wafer attachment; Costs; Electric variables measurement; Flip chip; Integrated circuit interconnections; Packaging; Security; Semiconductor device measurement; Stability; Substrates; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 2009. ECTC 2009. 59th
Conference_Location
San Diego, CA
ISSN
0569-5503
Print_ISBN
978-1-4244-4475-5
Electronic_ISBN
0569-5503
Type
conf
DOI
10.1109/ECTC.2009.5073999
Filename
5073999
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