• DocumentCode
    2066464
  • Title

    Reliability characterization and process optimization of Ni-based microinsert interconnections for flip chip die on wafer attachment

  • Author

    Boutry, H. ; Brun, J. ; Nowodzinski, A. ; Sillon, N. ; Depoutot, F. ; Dubois-Bonvalot, B. ; Schmidt, C. ; Simon, M. ; Altmann, F.

  • Author_Institution
    CEA-LETI Minatec, Grenoble
  • fYear
    2009
  • fDate
    26-29 May 2009
  • Firstpage
    74
  • Lastpage
    79
  • Abstract
    In many complex systems under development, the cost of integration and the compromises in performance that can result from the integration process can become prohibitive. Therefore, the establishment of a technology which enables the system level integration of devices from different technological families at the package level can become very attractive. In particular, since each component can be built in its optimum technology flow and interconnections within the package tend to be very short, very high performance can be achieved. The work to be presented in this paper describes direct and electrical reliability measurements of test structures used to optimise the electrical performance of micro insert based interconnection system as a function of flip chip mounting parameters. Micro-inserts have a great deal of potential for the face to face interconnection of stacked systems in three-dimensional integration technologies.
  • Keywords
    flip-chip devices; integrated circuit interconnections; integrated circuit metallisation; integrated circuit reliability; 3D integration technology; NiJkJk; flip chip die; microinsert interconnection; system level integration; wafer attachment; Costs; Electric variables measurement; Flip chip; Integrated circuit interconnections; Packaging; Security; Semiconductor device measurement; Stability; Substrates; System testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 2009. ECTC 2009. 59th
  • Conference_Location
    San Diego, CA
  • ISSN
    0569-5503
  • Print_ISBN
    978-1-4244-4475-5
  • Electronic_ISBN
    0569-5503
  • Type

    conf

  • DOI
    10.1109/ECTC.2009.5073999
  • Filename
    5073999