DocumentCode
2066799
Title
Interferometry for picometer-level dimensional stability measurements
Author
Voigt, D. ; Ellis, J.D. ; Verlaan, A.L. ; Bergmans, R.H. ; Spronck, J.W. ; Schmidt, R. H Munnig
Author_Institution
VSL Dutch Metrol. Inst., Delft, Netherlands
fYear
2011
fDate
22-26 May 2011
Firstpage
1
Lastpage
1
Abstract
The paper reports on the development of an optical heterodyne interferometer concept for the investigation of dimensional stability. The contactless, double sided optical scheme directly probes dimensional length changes of prismatic samples, whilst the balanced configuration provides common mode rejection of perturbations that act similarly on the measurement and the reference beam.
Keywords
light interferometers; measurement uncertainty; spatial variables measurement; common mode rejection; contactless optical scheme; double sided optical scheme; optical heterodyne interferometer; picometer level dimensional stability measurements; reference beam; Optical refraction;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location
Munich
ISSN
Pending
Print_ISBN
978-1-4577-0533-5
Electronic_ISBN
Pending
Type
conf
DOI
10.1109/CLEOE.2011.5942972
Filename
5942972
Link To Document